Papers

>2019

>2018

>2017
Borland IWJT-2017 Paper
44 PVSC-Borland paper #832

>2016
Borland JSPS Nov 2016
Borland Invited Oct 2016 ECS
Borland IIT-2016 Sn Implant paper
Borland IIT-2016 High & Low Dose

>2015
Borland Oct 2015 ECS invited paper
Borland IWJT-2015 Paper

>2014
IIT-2014 Doping in Si & Ge paper
Oct 2014 ECS Ge-implant LPE paper

>2013
IWJT-2013 Ge-channel formation
IWJT-2013 In & Ga HALO

>2012
IWJT-2012 Ga,C+Ga,In,In+BF2,BF2 HALOs.pdf
IIT-2012 Ga-HALO.pdf
IEEE-PVSC 2012 Solar Selective Emitter furnace vs implant.pdf
EU-PVSEC 2012 Selective Emitter.pdf

>2011

IWJT-2011 Retained Dose.pdf

>2010

iit-2010-p-usj-paper.pdf
rtp-2010-pusj-paper.pdf
rtp-2010-spe-and-lpe-n-usj-paper.pdf

2009
IEEE-RTP 2009 n+SiCP paper
IEEE-RTP 2009 B36 p+ USJ
Aug 2009 SST USJ paper
Insights 2009 p+ USJ
Insights 2009 High Tilt Implant

SemiconChina B36

2008

IEEE-RTP 2008 USJ paper

iwjt-2008-borland.pdf
july-2008-sst-paper.pdf
iit-2008-job-dns-paper.pdf
jan-2008-sst-paper.pdf

2007

2007-march-semiconductor-international-web-paper.pdf
2007-may-insights.pdf
2007-june-iwjt-job.pdf
2007-june-iwjt-job-nec.pdf
2007-june-iwjt-job-selete.pdf
2007-june-high-k-metal-gate-vlsi-sym-2007.pdf
2007-june-wafernews.pdf
2007-oct-rtp-borland.doc

2006

Dec Semiconductor International

June IIT Pli


June IIT USJ

May invited IWJT

May Solid State Technology

Oct RTP

2005

Jan Semiconductor International

May ECS Quebec

June invited IWJT

July Solid State Technology

USJ Implant Scaling

USJ Metrology

2004

April MRS

May Solid State Technology Epion

August Solid State Technology SSM

Oct ECS Ge doping

Nov Asia Pacific SST Imagers

IIT Alternative USJ Formation

IWJT Epion USJ

IWJT invited Plenary USJ

IWJT SSM 4PP

Nov SST Asia Supplement Imager DSG

2003

April ECS Paris

April Semiconductor International


March Solid State Technology

June Solid State Technology

2003-june-sst.pdf

2002

April invited MRS

June Solid State Technology

IIT SPE PLAD

IWJT

2001

March invited ECS

April Semiconductor International

Other key past papers

1983 May ECS 3-step IG

1983 May ECS IG Activation Bulk & Epi

1984 August Solid State Technology Epi Latch-up

1984 Nov MRS P&N Epi IG

1985 August Solid State Technology Device Isolation & SEG

1985 ECS IG P-well CMOS

1985 ECS N-wafer IG Twin Well CMOS

1987 Dec IEDM Twin Well SEG

1987 Dec invited IEDM SEG

1989 April Semiconductor International Intrinsic Gettering

1989 May Semicoductor International Intrinsic Gettering

1991-wet-dry-ex-situ-in-situ-cleaning.pdf

1993-ecs-selective-etching-of-native-oxide.pdf

1993-ssdm-selective-native-oxide-etching.pdf

1993-ecs-cvd-xii-multi-chamber-epi.pdf

1993 TiN CVD

1994 VLSI Sym H2 Denudation

1996 IIT PR Outgassing

1996 June Solid State Technology MeV Epi Replacement

1998 April Semiconductor International MeV Triple Well

1998 IIT Epi Replacement

1998 IIT Latch-up

1998 IIT Low Temp SPE

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